Abstract
In this paper, we propose micro electric power generation device. The device is fabricated by MEMS technique. PZT film is deposited onto a Si cantilever by magnetron RF sputtering. Electric power is generated when the cantilever is bended and stressed. The cantilever has 1200μm in length, 600μm in width, and 50μm in thickness. The device can convert mechanical vibration energy into electric energy. Good crystalline orientation was needed for high piezoelectric property. We analyzed the crystalline orientation of PZT by XRD, and decided the adequate deposition condition. The device generated electric power about 1pW.
