Abstract
To make micro parts such as some micro optical devices, bio devices and so on cheaply and massively, a micro forging of resin using micro dies is an advantage producing technique. Required performances of the micro die are high precision, surface roughness of nano order and the resistances of corrosion, high pressure and high temperature. Thus, we proposed a micro die of titanium superplastic alloy, SP700, and covered with a hard coat of titanium nitride, and have studied on the fabrication technique by superplastic forging of the alloy using a silicon master structure and by simultaneous diffusion bonding of functionally gradient layer of TiN/Ti with the Ti alloy.
