Abstract
In order to measure the pressure and the temperature of a contact between surfaces under a sliding-rolling contact condition, it was tried to develop a thin film sensor using MEMS (Micro Electromechanical Systems) process technology. In this paper, a contact pressure sensor was manufactured by lift-off method. The sensor consists mainly of thin wires made of palladium and a thin polyimide film. The performance of the sensor was investigated using a compression testing machine and a Wheatstone bridge circuit. The output voltage of the sensor raised as the compressive load increased. However, the output voltage of the sensor was not stable, as the sensor width became smaller.
