Powder Jet Deposition (PJD) method is one of the film forming technique& Ceramics films can be fabricated by this method Ytariastabilized zirconia (YSZ) thin films were deposited on various substrates by PJD method YSZ thin film was fabricated in systemically changed substrates, particle sizes and carrier gas pressures. The microstructures of YSZ films were observed by scanning electron microscope (SEM). From this study results, the amount of deposition rate by PJD method varies according to substrate hardness and powder size. Similarly, the film structures are affected by substrate and powder size. Additionally, the electrical conductivity of YSZ film on Al_2O_3 substrate was measured as a function of temperature using impedance and two-probe A.C. method From this measurement, the amount of this film's electrical conductivity is good agreement from other studies of YSZ bulks. This result shows probability of application to high temperature ceramics devices such as Solid Oxide Fuel Cells (SOFCs), gas sensors.
