1332 Magnetically Driven Micro-gas Valve using Bi-morph Magetostrictive Actuators
Details
In order to develop magnetostrictive actuator induced by low magnetic field, we investigated magnetostrictive (positive magnetostriction/negative magnetostriction) bimorph-layers, that is, rapidly solidified Fe-Pd, Fe-Ga ribbons (100 μm)/Ni(50 μm). Displacement of the upper part of bimorph-layers with length of 20 mm was 230 μm under low magnetic field (500Oe). The bimorph-layers actuator was applied in micro-gas-valve. Flow rate of Ar with 7kPa is driven by magnetic field of 350Oe.
