306 Amplitude and Phase Correction Method for Dynamic Measurements by Optical Lever AFM : Effect ofAdded Damping at Arbitrary Position of Cantilever

Abstract

Forced vibrations of a cantilever with a damping at the tip at the arbitrary position used in an atomic force microscope (AFM) have been analysed and vibration amplitude and phase shift of the cantilever end that will be measured by using the optical lever method have been predicted theoretically. It was found that the predicted amplitude and phase shift includes errors and correction of the amplitude and phase shift depending on the vibration freqency is necessary. The amplitude correction factor and phase correction value has been newly derived. These results are useful for ultrahigh accuracy measurements, especially dynamic measurements, using the AFM.