The proceedings of the JSME annual meeting
Online ISSN : 2433-1325
2008.8
Session ID : 310
Conference information
310 Characterization of Liquid Pumping Devices by Vibration of Channel Wall Composed of Piezoelectric Thin Film
Junya OGAWATakaaki SUZUKIIsaku KANNOHidetoshi KOTERA
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Abstract
In this paper, we propose and study innovative liquid pimping devices for microfluidic systems such as pTAS. In our study, microchaimels with vibrating wall were fabricated on silicon on insulator (SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the microchannel wall. The microchannel can transport liquid by traveling wave induced on channel wall by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. We examined the difference of the characteristics that were the to the effect of the structure of channel wall.
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© 2008 The Japan Society of Mechanical Engineers
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