313 Design of Microactuator powered by Collaboration of Electrostatic and Elastic energies/forces : Examination of non-linear spring structure
Details
The actuators using electrostatic energy have been reported. However, these actuators generally can generate low power. We proposed the novel drive principle of the microactuator, that makes electrostatic energy/force collaborate with the elastic energy/force. It is necessary to design the spring with the non-linearity to make the microactuator highly effective. In this paper, the non-linear spring was designed by using the FEM analysis. Mechanical performance of the micro actuator is also evaluated. Initial generated force of non-linear spring type is 2770 times higher than that of linear spring type.
