Abstract
A novel concept of a liquid transport technique utilizing frequency modulation and local resonance oscillation is proposed and it is applied to a micromixer. Meta-structure distributing local masses for generating local resonant oscillation is developed. Vibration of the meta-structure with sweeping frequency produces changes in the positions with large oscillation amplitude. This complex structural oscillation makes eddy-like disturbance of flow in a microchamber, and it produces high mixing efficiency. Using this technique produced a mixing index of 0.92 with the volumetric flowrate of 1 μL/min, while it was 0.49 for a conventional technique employing a vibration at a fixed frequency.