Nanoparticles have novel characteristics by quantum size effect. To produce homogeneous particles size and high purity particles continuously, many nanoparticles production methods have been proposed. In this paper, novel nanoparticles synthesis technique is proposed. The technique is applied FS-CVD method to the flame synthesis. In this method, the liquid precursors are supplied directly to a vacuum chamber through an injector and vaporized by flash boiling. So, the characteristics of nanoparticles are controlled by the atmosphere condition and the burner flame characteristics in this method. However, the burner flame characteristics are not examined at the low pressure ambient condition. In this experiment, the formation range of the burner flame and the flame characteristics by changing equivalent ratio and supply flux was examined.