There is a trade-off relation between sterilization of the food and the quality (nutritional value, color, shape and smell, etc.). Presently, the main priority is the guarantee sterilization of the food at the sacrifice of the quality. In this study, the practical effect of the sterilization was verified using a low-temperature plasma in which a sterilization process was achieved without damaging the quality of the food material. For sterilization of porous food such as Hijiki and Zenmai, a boiling heat treatment was usually required, but the non-heating sterilization was realized by the plasma exposure. Also, the hydrophilicity groups formed on the surface of the porous food such as Hijiki and Zenmai, using oxygen or air plasma irradiation process. In the aqueous cleaning after the plasma exposure process, it was proven that the microorganism which inhabits the inside of the food was effectively removed with a rinse using regular tap water. It was confirmed that the absorbency of the Hijiki by the oxygen plasma treatment was more effective than that of the air plasma treatment.