Abstract
The flow around MEMS (Micro Electro Mechanical System) is so-called the high-Knudsen number flow. The flow field cannot be treated as a continuum and the thermal conduction must not be treated by ordinary Fourier's law. In high-Knudsen number flows, the gas-surface interaction becomes important and the energy accommodation coefficient, an empirical parameter, is often used to analyze heat transport phenomena. The energy accommodation coefficient is different depending on combination of surface and gas. Thus, it is important to use the appropriate energy accommodation coefficient for each pair of surface and gas for accurate thermal management. In this report, we obtained the energy accommodation coefficients for argon and oxygen in contact with platinum surface by the Low-Pressure (LP) method, using the theoretical heat flux equation expanded to transition regime. The experimental result was compared with previous result by Thomas and Olmer (1943), which reported a relation between the energy accommodation coefficient and the surface temperature, and they are good agreement.
