Abstract
This paper describes a capacitance type airflow sensor, based on insects' sensillar seta. Some insects such as crickets begin escape behavior by sensing a minute airflow with sensillar seta. The sensor consists of a metal cantilever and an insulation layer. Air flow bends a hair connected to the cantilever, which causes the deflection of the cantilever and change in the capacitance between the cantilever and the substrate. The sensor was attached to the linear guide and moved at various speeds up to 750mm/s. The capacitance was measured using an LCR meter. The results showed that the capacitance increases linearly with increasing speed of air flow ranging from 350mm/s to 750mm/s.
