T0301-1-3 Fatigue behavior of the silicon under inert environment

Abstract

A novel fatigue test technique with gradually increasing stress amplitude was applied to poly crystal line silicon thin films in order to survey possible fatigue degradation in strength in inert environment. The results were compared with the behavior in high humidity environment. It was revealed that even static strength was weakened with high humidity and that fatigue weakening was observed also in inert environment in addition to the strengthening effect with cyclic loading.