G1300-1-2 Study on fine groove milling of micro-channel die : Selection guideline of cutting conditions using micro-endmill

Abstract

The micro-channel chip (micro total analysis system) attracts attention in the medical field. Generally, the photo lithography technology used in a semiconductor manufacture process is used as the manufacture method of a micro-channel chip die. However, there are many manufacturing processes like fabrication of a mask, the photo-resist application to a substrate, expensive facility of a clean room etc. So, this study examined how to form a fine groove by cutting with a micro endmill. This report examined experimentally the processing conditions which should be developed. As a result, we created the selection guideline of cutting conditions in which burr could be reduced.