S1108-2-4 Effects of Applied Heat and Sliding on Structure Changes of DLC Film

Abstract

Diamond-like carbon (DLC) films are expected to use in various applications such as cutting tool, steel mold, general machinery elements. On the other hands, there are some practical subjects for DLC films. Particularly, such as heat proof, deregulation of residual stress and improvement of adherence are focused on in general. In this study, we focused on the heat proof to utilize the DLC films which the surface becomes high temperature. Ball on disk tester and micro laser Raman spectroscopy are employed to research the effects of applied heat and sliding on structure changes on the DLC films. In this study, ball on disk test after heating at 300℃. 350℃, 400℃ are accomplished. Then, the structure changes of the DLC films are analyzed by micro laser Raman spectroscopy.