J0503-1-4 Accuracy Estimation Method of 3D-Shape Measurement Using Whole-space Tabulation Method

Abstract

In this paper, an accuracy estimation method of 3D-shape measurement using whole-space tabulation method (WSTM) is proposed. WSTM is a calibration method for a shape measurement. Pixel-by-pixel calibration tables are produced with multiple reference planes. This method excludes a lens distortion and the intensity warping of the projected grating in measurement results theoretically. A high-speed and accurate shape measurement system can be possible to develop easily using this method. Random noise, however, causes error in this method. The primary factor of error is random noise occurring in an imaging device. The accuracy of a shape measurement setup can be estimated from the random noise occurring in the imaging device.