Abstract
It is well-known that the titanium based hard thin ceramic films were utilized such as cutting tools, molding dies, sliding parts, because of its reducing effect on the wear. Especially, TiAlN film has high oxidation-resistance at high temperature. Then, recently, clarifying the properties of TiAlN film under the actual environment; without lubrication, in the water, and in the paraffin oil at high temperature, is required. In the present paper, TiAlN films have been prepared by an arc ion plating method, and were tested under various environment with ball on disk tribometer. It was ensured that the oxidation of films and the adhesion of balls were reduced under the liquid environment. However, under the distilled water and water-soluble oil environment, the oxidation of films were increasing as rising the temperature of the liquid.
