Abstract
Flows in a nanochannel was considered and were categorized into two regions according to the channnel size. The first is the channel size is still large enogh compared with a molecular size. In this case, rarefied gas dynamics can be applicable. The other is the channel size becomes much smaller and in the same order of the molecular size. In this case, rarefied gas dynamics becomes invalid and characteristics of flow and chemical reaction seems to be very different from hose of the first one. Furthermore, examples of nanochannel fabrication methods, using porous alumina and mesoporous silica were introduced.
