Abstract
Disposable, built-in micropumps are key devices for biochip technology. In this study, we propose two types of all-polymer built-in micropumps driven by light. First one is a lobed micropump that generates flow by using positive displacement. The lobed microrotors are driven by a synchronized laser-scanning method. Second one is a viscous micropump that generates flow by using drag force surrounding the rotor. This pump generates flow just by rotating a single disk rotor or a double helical rotor in a U-shaped microchannel. These micropumps enable ultralow flow control on the order of pL/min. The ultralow flow rate will be useful for further integration and miniaturization of micro-total-analysis systems.
