The Proceedings of the Materials and Mechanics Conference
Online ISSN : 2424-2845
2007
Session ID : 310
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310 Effect of Elastic Anisotropy of Substrates on Thin Film/Substrate Indentation
Norimasa Chiba, Yuta Ohori, Nagahisa Ogasawara, Kazunori Shirato, Xi Chen
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Keywords: film, substrate system, elastic amisotropy, Si single crystals, Young's modulus, finite element analysis
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© 2007 The Japan Society of Mechanical Engineers
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Proceedings of the 1992 Annual Meeting of JSME/MMD

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