Abstract
In this paper, we presented the performance assessment of a valve-less piezoelectric pump through piezoelectric-fluid interaction finite element analysis to support the design of piezoelectric actuator and channel in MEMS and u-TAS. At first, the effect of fluid interaction on the amplitude and phase of vibration was analyzed for bimorph piezoelectric actuator. Then, the velocity and Ihe flow rate in micro channel were investigated computationally.
