The Proceedings of the Materials and Mechanics Conference
Online ISSN : 2424-2845
2012
Session ID : PS20
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PS20 Micro-Texture Dependence of the Strength of Fine Metallic Bumps Used for Electronic Packaging
Fumiaki ENDOKen SUZUKIHideo MIURA
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Abstract
Microtexture dependence of the strength of electroplated copper bumps used for fine interconnections in electronic packaging were investigated experimentally considering the effects of their electroplating conditions and heat treatment after the electroplating. Not only Young's modulus but also the strength of electroplated copper thin films changed drastically depending on the change of their micro texture, and these values were significantly different from conventional bulk copper.
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© 2012 The Japan Society of Mechanical Engineers
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