Creep crack growth tests using C(T) specimens are standardized by ASTM E1457. To realize uniform creep crack growth, C(T) specimens with side-groove are used for the tests. However, due to difference of creep ductility and creep crack growth behavior for each material, the optimum depth of side-groove has not been yet defined strictly. In this paper, to characterize the optimum depth of the side-groove, diffusion analysis of vacancy around a notch tip was conducted based on micro damage mechanics.