Safety margin for fatigue life is a critical factor in designing machinery in the appropriate quality. To determine the safety margin rationally, estimation of the fatigue life is very important. Surface finish is one of the factors that affects the fatigue life. In this research, we try to clarify the influence of the surface finish, especially on the surface damage on low cycle fatigue life. We prepared several Inconel 718 specimens with different surface-finishing conditions and obtained low cycle fatigue life. Also we obtained Local Misorientation Parameters (LMPs) using EBSD observation and measure the residual stress.