OS1108 Development of evaluation method for copper crystal plasticity with small-scale specimens

Abstract

Mechanical property of copper crystal plasticity in micro-scale line in LSI was required to keep mechanical reliability of LSI. New torsion test specimen which was made by Cu single crystal was created to evaluate parameters of crystal plasticity. By using this specimen, torsion test can be performed only uniaxial compression. Experiment and finite element method was conducted, and crystal plasticity parameter was evaluated by fitting load-displacement curve of each results. Though crystal plasticity which commonly used shows gradually hardening behavior, in this case, Cu single crystal plasticity of micro structure indicated softening behavior after yielding.