OS1501 Improvement of Sample Structure for Multiple Fabrication of Al Micro-Materials by Utilizing Electromigration
Details
Micro-materials attract attention with their remarkable properties, including mechanical, thermal, electrical attribute. Various techniques have been developed for fabricating micro-materials. The fabrication technique by utilizing electromigration (EM), which is the physical phenomenon of atomic diffusion in a metallic line with a high-density electron flow, is one of the fabrication methods for generating micro-materials. EM technique can generate micro-materials with a high-aspect ratio, pure Al components, an arbitrary form, and a single-crystal structure. Whereas EM has significantly advantages, multiple micro-materials are difficult to fabricate simultaneously. The technique using conductive passivation and comb pattern has been recently developed for fabricating multiple micro-materials by the authors. The present study demonstrates the multiple fabrication more than previous research, and provides the approach for improving fabrication of multiple micro-materials by EM.
