Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 08, 2016 - October 10, 2016
A strain sensor which can monitor the change of local stress distribution in 3-D stacked structures was developed by applying the piezoresistive effect of single-crystalline silicon. The sensor was embedded in a silicon chip, and it measured the impact effect for the chip during the manufacturing and operating process of electronic products. The strain dependence of the electrical conductivity of the sensor was evaluated. Fabricated sensor showed liner voltage-current characteristics and the gauge factor of about 100.
