Simultaneous Measurement of Displacement and Rotating Angle of Specular Object Using Imaging-type Deflectometry

Abstract

In the conventional deflectometry, since an observation target is a mirror image by an observed mirror, the sensitivity to measure the titling angle of the observed mirror is very high. On the other hand, it is hard to use this method to measure the displacement of the observed mirror because the sensitivity is too small to detect the component of out-of-plane displacement. Therefore, for using the deflectometry to measure out-of-plane displacement, we had proposed a new type of deflectometry method, in which the observation target is imaged near the surface of the observed mirror. We called it 'imaging-type deflectometry'. In this study, we propose a method that can separate out-of-plane displacement and rotation angle components and simultaneously measure them.