The Proceedings of The Manufacturing & Machine Tool Conference
Online ISSN : 2424-3094
2000.2
Conference information
Ultrahigh Accurate Measurement of Aspheric Lens and Wafer
Kouji HANDAKeishi KUBOHiroyuki TAKEUCHIKeiich YOSIZUMI
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 207-208

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Abstract
These days Aspheric Lens is much used in a variety of areas such as Visual, Information and Medical Instruments et al., and it is getting more complex and high accurate. This paper describes Ultrahigh Accurate Measurement Technology supporting development and production of Aspheric Lens and application of this technology in measurement of Wafer for next generation mass-storage semiconductor.
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© 2000 The Japan Society of Mechanical Engineers
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