Abstract
Fabrication methods of micro grooves are investigated. Two types of processing methods are developed. One is laser-assisted etching, and the other is mechanical processing using a burnishing tool. In laser-assisted etching, the spiral grooves were formed on a 0.5-mm-diameter shaft. This method successfully formed grooves 8μm in width and 2μm in depth on the surface of a shaft. Next, in the burnishing method, effects of grooving conditions upon groove geometry were studied. The profiles of micro grooves less than 1μm m in depth were compared with the geometry of a diamond tool. Texture pattern with micro grooves was formed using the burnishing method.