Abstract
Accuracy of conventional interferometric methods for three-dimensional surface profiling is limited by errors of intrinsic metrics inside interferometric microscopes. A simple technique of XY axes calibration is proposed to measure those intrinsic errors resulted from CCD pixel arrays and objective lens distortion. In this self-calibration technique, a inclined plane is used as the specimen. Two sets of profile measurement data before and after a small shift of the specimen in the X (Y) axis direction are used to obtain the calibration curve concerning the intrinsic errors. Test results based on computer simulation are reported.
