Ultraprecision Profile Measurement of Fine-groove with Micro-probe

Abstract

In the on-machine measurement, there are many merits in accuracy and efficiency because it is possible to measure a profile of various forms without attaching and removing the workpiece. Recently, many optical components with fine grooves, such as gratings of Fregnel lens, have been used, but it had been difficult to measure such profiles accurately. So the ultraprecision profile measuring probe with the fine stylus which enables a fine profile to be measured has been developed.