Micro-ELID Grinding of Germanium Grating

The Proceedings of The Manufacturing & Machine Tool Conference

Online ISSN : 2424-3094

2002.4

DOI https://doi.org/10.1299/jsmemmt.2002.4.49

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Micro-ELID Grinding of Germanium Grating

Hitoshi Ohmori, Yoshihiro Uehara, Tohru Suzuki, Tomoyuki Shimizu, Weimin Lin

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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 49-50

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Article 1st page

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© 2002 The Japan Society of Mechanical Engineers

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