Abstract
An ultraprecision positioning table system is one of the most important components in nano manufacturing systems. This paper describes an ultraprecision XY positioning table system newly developed. The table is levitated by aerostatic bearings and driven by voice coil motors arranged symmetrically about the driving axes. The table is, consequently, free from the non-linear behavior and the direction dependency. The positioning capability of the developed system has been verified through a series of nano-positioning experiments.
