Abstract
Micro-meso mechanical manufacturing (M4) technology has recently attracted attentions as an alternative micromachining solution because of its potentials of processing variety in materials into 3 dimensional forms. Using a micro lathe, which is installable and operational in a SEM (scanning electron microscope), we control the position of XY stage of the micro lathe with visual feedback from CCD camera. We also compare the positioning control with visual feedback to the positioning control with number of pulse.
