Abstract
Depth-sensing nanoindentation tests were made on single-crystal InP at various loads using a sharp pyramid-type diamond indenter, and the resulting indents were examined using SEM and TEM. The results suggest that dislocations and slips dominate the deformation mechanism, where no phase transformation occurs. A high-density dislocation region was formed just beneath the indenter, below which is a low density dislocation region. The geometry and size of the high density dislocation region showed a correlation to the shape of the indenter and the indentation load. The dislocations along the <111> directions were dominant. The micro hardness of InP was also experimentally obtained.
