Development of a Measuring Apparatus for Shape and Dimension of Micro-components : Introduction of a Dual Servo Measurement System

Abstract

In order to facilitate the advancement of micro machine technology and to encourage its use across a wider range of industrial fields, measuring technology appears to be essential To this end, we have developed a small three dimensional form measuring apparatus which has non-contact probe detecting proximity to measuring object through tunneling effect. In this study, we have introduced dual servo control system to realize a high resolution and wide measuring range in sur&ce roughness measurement of micro-components on the inkro-3D-CMM.