Abstract
The novel finishing process using the optically trapped particle as a polishing tool have developed in order to improve the surface quality as well as a few nano meter RMS. This process enables to polish the surface in selected area as small as 10μm^2. The mechanical contact of the particle makes the roughness of the substrate smooth. It is considered that a machining process is enhanced by the thermal, chemical and photo induced effect. In this report, we perform the laser trapping of a silica particle with a diameter of 1 micro meter by using ultraviolet laser in order to investigate the photo induced effect in UV wavelength.
