Abstract
In order to realize an ultra-precision machine tool, it is necessary and indispensable to develop ultra-precision table positioning technology. In particular, the high speed and ultra-precision table system with wide driving function is urgently required. A belt-driven table system is effective means for coarse driving mechanism because of compactness, simple structure, quick response and long driving distance. In this paper, a positioning table system equipped with a belt drive mechanism was newly developed and then the basic performance of the developed table system was evaluated.
