The Proceedings of The Manufacturing & Machine Tool Conference
Online ISSN : 2424-3094
2006.6
Session ID : 416
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416 Fabrication of Microtube by Electroplating combined with Micro Fluidics
Takeshi SAITOLow PeterNobuyuki TAKAMABeomjoon KIM
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
In this article, the new fabrication method of metal microtubes structure is proposed. The method consists of the combination of simple electroplating method and micro fluidics is used for the fabrication of the metal microtubes on a silicon wafer. This method makes it possible to fabricate metal microtubes array in high through-put, low cost way.
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© 2006 The Japan Society of Mechanical Engineers
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