Abstract
A demand for the mold of micro-lens is on the increase. As a system for the machining of micro-lens mold, a desk-top machine tool is being expected. But, when the grinding wheel with the small diameter is used, the ELID grinding method has a problem about the installation setting place of the negative electrode along the wheel. In this research, we developed a system to electrolyze the small type ELID grinding wheel. This system was realized ELID grinding processing without using the negative electrode along the wheel, for the purpose of machining of micro lens mold. That result succeeded in the development of the SLID grinding system which uses nozzle type electrodes (new electrode less ELID grinding method). Then, the processing using this system could get the mirror surface of Ra 12nm without electric discharge scar. There was a small abrasion of SLID grinding wheel and abundant volume of material removed.
