Abstract
Tool condition is one of the essential factors for the machining of the micro-groove having high diffraction effect. Therefore, custom-designed diamond tools could be applied, which need some experience and skill for getting the fine surface. In this study, the high accurate and versatile machining method for micro rectangular groove was reported. This was aimed at rotational diffraction form and carried out by coordinated control of 2 linear axes and a rotary table. In the results, micro rectangular grooves less than 0.005mm and multi-step forms were obtained.
