Abstract
The micro-channel chip (micro total analysis system) attracts attention in the medical field. Generally, the photo lithography technology used in a semiconductor manufacture process is used as the manufacture method of a micro-channel chip die. However, there are many manufacturing processes like fabrication of a mask, the photo-resist application to a substrate, expensive facility of a clean room etc. So, this study examined how to form a fine groove by cutting with a micro endmill. This report examined experimentally the processing conditions which should be developed. As a result, relation between cutting conditions and form accuracy, surface roughness of fine groove, were clarified.
