Abstract
A new positioning device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the table by submicron meter. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 5.6 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 5 Hz which is enough wide for the frequency response to realize the precise positioning. The positioning stage is controlled by PI control. The positioning accuracy is accurate enough for the precise positioning.
