Abstract
Vibration isolation is widely conducted for precision machinery in order to reduce errors due to disturbance. This paper newly presents a non-contact type active vibration isolation unit which consists of an air spring, a voice coil motor, and an aerostatic bearing in order to achieve non-contact condition. In addition, the active vibration isolation with a PID controller reduces an influence of direct disturbance force. By using both the non-contact structure and the PID controller, the resonances in ground vibration transmission and direct disturbance transmission can be successfully reduced.
