Abstract
Demands for a precise plane with a large area have recently increased in a variety of industries such as optical devices, silicon wafers, precision machining devices, etc. In order to meet such demands, high speed surface measurement over a large scanning range is required. This paper presents a proposed robust surface measurement using the proposed Hyper-Multi-Point method. The Hyper-Multi-Point method uses multiple displacement sensors. This method is not influenced by the motion error, sensor noises, etc. The evaluation results confirmed that the proposed Hyper-Multi-Point method achieves robust and high speed wide-ranging measurement.
