Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 22, 2016 - October 23, 2016
Hydrostatic bearings have been widely applied to ultra-precision machine tools and measuring equipment because of their high load carrying capacity, high stiffness and high accuracy of motion. Generally, these hydrostatic bearings uses fixed restrictors such as capillary, orifice etc. to feed pressurized oil into the bearing clearance. Additionally, in a case of nanometer-order of machining or measuring accuracy is required for these equipment, a self-controlled restrictor is used to achieve nearly infinite bearing stiffness. In this paper, an actively-controlled hydrostatic thrust bearing using an elastic hinge and a voice coil motor was proposed, and the static and dynamic characteristics of the proposed bearing were investigated experimentally. It was consequently found that the proposed bearing could achieve very high static stiffness
