Host: The Japan Society of Mechanical Engineers
Name : [in Japanese]
Date : October 22, 2016 - October 23, 2016
Linear positioning table systems with rolling guide are employed by many mechanical systems. However, because it has nonlinear behavior due to the friction force in small load region, a construction of incorporating appropriate compensator control system is required. In this paper, the friction characteristics of rolling guides, that is expressed by a simple model based on Masing's rule, was incorporated in the positioning compensator.This compensation method inhibited the error due to the nonlinear behavior during driving and realized ultra-precision positioning with high tracking performance and practical use.