A Study on Influence Analysis of Tool Setting Errors for On-Machine Measurement in Multi-axis Control Ultraprecision Machining

Abstract

In order to achieve ultraprecision machining, commercial scanning devices for on-machine measurement have been developed to realize corrective machining without removing the workpiece from machine tools. However, the shapes to be machined shift to more complicated free curved surface such as a non-axisymmetric and non-spherical shape. Thus, it takes long time to scan whole surface of the workpiece. In addition, tool setting errors are remarkably larger than positioning errors of ultraprecision machine tools. Therefore, in order to generate efficient scanning paths, a method based on form shaping theory is devised to analyze both the machined surface and the measurement results influenced by the tool setting errors.